38. Zhi Zhang, Haisheng Fang*, Qingxia Yao, Han Yan, Zhiyin Gan, Species transport and chemical reaction in a MOCVD reactor and their influence on the GaN growth uniformity", Journal of Crystal Growth 454 (2016) 87–95.
下一条:Uniformity analysis of temperature distribution in an industrial MOCVD
【关闭】
2017 © Multiscale Process Modeling Lab