Uniformity analysis of temperature distribution in an industrial MOCVD

2017年09月26日 08:52  点击:[]

37. Jiang Zheng, Haisheng Fang*, Zhi Zhang, Jinzhe Yang, Zhiyin Gan, Han Yan, "Uniformity analysis of temperature distribution in an industrial MOCVD", Cryst. Res. Technol., 1–10 (2016) / DOI 10.1002/crat.201600195.

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