Influence of species transport and inlet condition on the MOCVD-grown GaN uniformity

2017年09月26日 08:56  点击:[]

9. Zhi Zhang, Haisheng Fang, Jiang Zheng, Han Yan, Zhiyin Gan, Influence of species transport and inlet condition on the MOCVD-grown GaN uniformity, Proceedings of the ASME 2016 International Mechanical Engineering Congress & Exposition, IMECE2016-65833, 2016.

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